Semiconductor materials, structures and device diagnostics
Semiconductor materials, structures and device diagnostics is an integrated experimental service for the characterization of semiconductor materials, thin films, nanostructures, multilayer structures and semiconductor-based devices. The service combines surface, structural, optical, chemical, compositional and electrophysical diagnostics using the equipment of the Core Facility Center “Diagnostics of Semiconductor Materials, Structures and Device Systems” at the V. Lashkaryov Institute of Semiconductor Physics of NAS of Ukraine. The service may include scanning probe microscopy, Raman, photoluminescence and FTIR spectroscopy, high-resolution X-ray diffraction and reflectometry, SIMS/SNMS and XPS analysis, spectral ellipsometry, electrical characterization, Hall effect measurements, and optical microscopy. Depending on the research task, the diagnostics can be focused on surface morphology, nanoscale electrical properties, structural quality, phase composition, chemical bonding, impurity profiles, optical constants, carrier concentration, mobility, resistivity and device-level electrical parameters. The service is suitable for research and development tasks in semiconductor physics, surface physics, optoelectronics, photonics, THz and IR semiconductor micro- and nanophotoelectronics, sensor systems, semiconductor lighting, and photovoltaic device engineering. The uploaded ISP CKKNO description lists these areas as priority activities and identifies the relevant laboratories and equipment complexes of the Centre
What the user gets
The user receives a diagnostics package agreed before the measurements. Depending on the selected methods, the package may include measurement data, processed results, images, spectra, plots, parameter tables and a short technical interpretation.
Typical outputs may include:
Surface and nanoscale diagnostics: AFM/SPM images, surface topography maps, roughness parameters, surface potential maps, conductive AFM maps, capacitance microscopy data, local I–V and C–V characteristics, nanoindentation and nanotribology results.
Optical and spectroscopic diagnostics: Raman spectra, photoluminescence spectra, FTIR transmission/reflection/ATR spectra, 2D or 3D maps of strain, chemical composition, temperature, carrier concentration, mobility or optical emission, where applicable.
Structural diagnostics: X-ray diffraction scans, reciprocal space maps, reflectometry curves, phase analysis, structural quality assessment, residual stress data, and parameters of multilayer epitaxial structures such as layer thickness, composition and period.
Chemical and compositional diagnostics: SIMS, SNMS and XPS data, elemental composition, impurity depth profiles, surface distribution maps, chemical bonding information and near-surface chemical state analysis.
Electrical and device diagnostics: I–V characteristics, C–V characteristics, admittance spectra, impedance spectra, resistance, resistivity, sheet resistance, magnetoresistance, carrier concentration, Hall mobility and Hall coefficient as functions of voltage, temperature or magnetic field.
The final output can be provided as raw data files, processed tables, graphical plots, microscopy images, spectra, and a short measurement report in PDF or editable format. The exact content of the output is defined by the measurement plan and the selected diagnostic methods.
Service category: Experimental Access Service
Hosting partner: Lashkaryov Institute of Semiconductor Physics
Related node / facility: Semiconductor Materials Diagnostics Core Facility
Resources used
- Equipment for electrical characterization of semiconductor materials, structures and nanoscale devices
- Experimental materials characterization profile
Access modes
- Physical access
- Collaborative access
- Pilot access
Typical data outputs
- Raw experimental data
- Processed experimental data
- Metadata record
- Dataset with DOI
- Report
FAIR requirements
Each measurement should be accompanied by minimum metadata describing the sample, method, instrument, measurement conditions and data output. The user should provide sample ID, material system, sample type, substrate, layer structure, preparation method, sample dimensions, contact geometry where relevant, and restrictions on handling or reuse. The service provider should document the instrument, method, configuration, measurement date, responsible laboratory, units, file formats, calibration information and processing steps.
Recommended metadata elements include sample ID, material or structure, sample type, diagnostic method, instrument used, measurement conditions, data type, units, processing method, access status and licence or reuse conditions. Where possible, data should be exported in open or reusable formats such as CSV, TXT, XLSX, TIFF or PNG, together with original instrument files when needed for verification or reprocessing. For repository publication, the dataset should include clear file names, README documentation, method descriptions and sufficient metadata for future reuse.
User obligations
The user must provide a clear description of the research task, the expected diagnostic result and the type of samples before the work starts. The user should specify which properties are of interest: morphology, structure, composition, impurity profile, optical properties, electrical characteristics, Hall parameters, device parameters or another measurable quantity.
The user must provide properly labelled samples and sufficient technical information for safe and correct measurements. This includes sample material, dimensions, substrate, contact scheme, surface condition, fragility, toxicity or contamination risks, thermal or electrical limits, and any special handling requirements. For electrical and Hall measurements, the user should provide information about contact geometry, expected resistance range, admissible voltage/current limits and temperature constraints.
The user is responsible for confirming that the submitted samples may be measured on the selected equipment and do not pose unacceptable risks to personnel, instruments or other users’ samples. Hazardous, radioactive, biologically contaminated, chemically unstable or otherwise risky samples must be declared in advance.
The user should agree in advance on the measurement plan, required methods, number of samples, expected output format, deadlines, confidentiality conditions and publication rules. If the results are used in publications, reports, theses or project deliverables, the user should acknowledge the facility, the responsible laboratory and the specific equipment or service used, according to the agreed acknowledgement text.
The user should not reinterpret the measurement results as certified conclusions unless the service explicitly includes certified or metrologically attested measurements. Where the service provides experimental data and technical interpretation, scientific conclusions remain the responsibility of the user or the joint research team.