Equipment for electrical characterization of semiconductor materials, structures and nanoscale devices
The measuring complex is designed for rapid electrical and electrophysical characterization of semiconductor materials, structures and nanoscale devices. It supports DC and AC electrical measurements, including current-voltage characteristics, capacitance-voltage characteristics, admittance spectroscopy, impedance spectroscopy, four-point probe measurements and Hall effect measurements. The system enables determination of resistance, resistivity, sheet resistance, magnetoresistance, carrier concentration, Hall mobility and Hall coefficient as functions of voltage and temperature.
Resource type: Instrument
Hosted / supported by: Semiconductor Materials Diagnostics Core Facility
Technical notes
This measuring complex is designed for rapid electrical and electrophysical characterization of semiconductor materials, structures and nanoscale devices. The complex includes an optical microscope Axioskop 2 MAT, Agilent 4156 semiconductor parameter analyzer, Agilent 4284 LCR meter, Keithley 6487 precision power supply, Keithley 6485 picoammeter, a four-point probe setup with sample heating up to 120 °C, a nitrogen cryostat for two-probe measurements in the 77–350 K temperature range, and an ezHEMS™ Hall effect measurement system. The complex supports DC and AC electrical measurements, I–V, C–V, admittance and impedance spectroscopy, four-point probe measurements, Hall effect measurements, and optical microscopy.
Data outputs
Typical data outputs include current–voltage characteristics, capacitance–voltage characteristics, admittance spectra, impedance spectra, resistance, resistivity, sheet resistance, magnetoresistance, carrier concentration, Hall mobility, Hall coefficient as functions of voltage and temperature, and optical microscopy images in bright-field, dark-field, polarization, luminescence and differential interference contrast modes.
Services using this resource
Semiconductor materials, structures and device diagnostics
Semiconductor materials, structures and device diagnostics is an integrated experimental service for the characterization of semiconductor materials, thin films, nanostructures, multilayer structures and semiconductor-based devices. The service combines …